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Influence of fabrication errors on modal amplitude in a dual-mass silicon micro-gyroscope is present in this paper. Firstly, the structure and operation principle a dual-mass silicon microgyroscope is introduced. Then the equation of amplitude ratio between left and right proof mass is deduced. Finally, the simulation analysis of fabrication errors on modal amplitude is implemented. The simulation results show the amplitude ratio is decreased to -1.2741 when the left proof mass error is 5% in anti-phase driving mode. The amplitude ratio is increased to -0.800 when the left stiffness error is 5% in anti-phase sensing mode. Introduction Silicon micro-gyroscopes are sensors using MEMS technology. Because of their features such as small size, intelligence and suitable for mass production, silicon micro-gyroscopes have been widely applied in military, industrial and other fields. The biggest difference between silicon microgyroscopes and traditional gyroscopes is that silicon micro-gyroscopes are fabricated by micromachining process. Although the precision of the micromachining process is quite high, there are inevitable errors during processing. Two proof masses and stiffnesses in the left and right structures will be unequal if fabrication error occurs in the dual-mass micro-gyroscope [1]. The unequal proof masses will change the gyroscope mechanical properties. Therefore, it is important to analyze the impact of fabrication errors on mechanical properties in dual-mass micro-gyroscopes. In this paper, we present the analysis and simulation of fabrication errors on modal amplitude in a decoupled dual-mass silicon micro-gyroscope. Principle of decoupled dual-mass silicon micro-gyroscope A decoupled dual-mass silicon micro-gyroscope is shown in Fig.1. This gyroscope is composed of two identical single-mass gyroscopes. There are two sets of driving frames on the left and right side of the gyroscope. Driving frames are connected to proof masses by sensing decoupling springs. There are two sets of driving sensing frames between two proof masses and two sets of sensing frames on the top and bottom of the proof masses. Sensing frames are connected to proof masses by driving decoupling springs. On the top and bottom of the gyroscope, there are two lever mechanisms. The lever mechanism is used to reduce the in-phase sensing modal and amplify the anti-phase sensing modal. When driving voltage is applied on driving electrodes, the driving frames will be excited to Joint International Mechanical, Electronic and Information Technology Conference (JIMET 2015) © 2015. The authors Published by Atlantis Press 1199 resonant vibration by the driving combs. The vibration will be translated to proof masses by sensing decoupling springs, whereas driving decoupling springs in driving direction is flexible, leading to a drive decoupling with respect to the sensing frames. If there is an external angular rate along the Zaxis, the proof masses are driven into a vibrating motion by the Coriolis forces. This motion is translated to the sensing frames via driving decoupling springs, whereas sensing decoupling springs in driving direction is flexible, leading to a sense decoupling with respect to the driving frames. Sensing Cmbo Driving Decoupling Spring Sensing Frame Sensing Spring Driving Sensing Frame Driving Coupling Spring Base beam Sensing Decoupling Spring Anchor Sensing Coupling Spring Lever beam Driving Sensing Comb

Influence research of fabrication errors on modal amplitude in a dual-mass silicon micro-gyroscope