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In this work, SAW resonators with high temperature piezoelectric LGS substrate have been studied. A layer of AlN piezoelectric film is deposited on the SAW devices. The influences of the AlN film on the characteristics of the SAW device have been explored. The simulation results show that the resonance frequency and the quality factor of the SAW device with AlN film is larger than that of the SAW device without AlN film. The experimental results agree well with the simulation results. The increase of the resonance frequency is interpreted by the coupling effect between acoustic waves propagating in AlN film and LGS substrate. Keywords-SAW sensor, FEM, LGS, AlN film.

Research on the LGS SAW sensor coated with AlN film