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The year 2019 marks 45 years in the development of Deep Level Transient Spectroscopy (DLTS) the signal processing method for determination of overlapping deep levels in semiconductors. From its introduction in 1974 by David Lang (D.V. Lang, J. Appl. Phys. 45, 1974, p.3023) to this date the DLTS method has undergone many changes and modifications: some were purely theoretical speculations, some were to include new experimental arrangements and techniques. This paper provides a short review on DLTS data processing techniques, focusing on the main three approaches widely used today. We also summarize the contribution of our group in the Faculty of Physics, VNU University of Science.

Data processing methods for deep level transients measurement