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In pattern developmemt, a removal property of bubbles formed on a concave window pattern made of DFR (dry film resist) is characterized. The sizes of the DFR window pattern are 100μm square and 50μm height. The fundamental factors of removal property can be explained by means of interaction analysis among interfacial energies. The experimental results obtained are analyzed based on the free energy balance model thermodynamically. The factor of micro bubble removal from the DFR window pattern is discussed for the suitable micro pattern fabrication. By adding a hydrophobic nonionic surfactant, both polar and dispersion components of surface energy of the developer clearly decrease. These components change act to decrease surface tension of the developer. The effectiveness of low surface tension developer on the removal property of micro bubble can be explained based on surface energy.

Effect of Low Surface Tension Developer on Micro Bubble Removal from Resist Square Window Pattern