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A high-resolution scanning phase-measuring acoustic microscope was used to investigate the near-surface residual stress distribution in mono-crystal silicon and pure aluminum. The 4-point bending device was newly developed and used to measure an acoustic .velocity applied stress curve for the materials. The stress dependence of acoustic velocity was presented and compared with a theoretical result. Image of the stress field at the diamond ductile cutting surface of monocrystal silicon was observed. The stress distribution by the acoustic method was much the same as that by the micro-laser Raman method. It was found that the acoustic velocity in pure aluminum at the prastic deformation field was non-linear and satulated.

Study on Residual Stress Measurement of Precision Machining Surface for Using Scanning Phase-measuring Acoustic Microscope.