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In order to evaluate the mechanical properties of diamond-like carbon(DLC) thin films formed on the substrate of single crystal copper or aluminum by EBD, the indentation test using Vickers diamond is carried out both in an ultramicro hardness tester and in a computer. Experimental results obtained are compared with those obtained by MD simulation. The natural vibration of carbon atoms in DLC model made by MD simulation using Tersoff potential energy coincides well with the Raman spectra of the DLC film which is measured to characterize the structure. MD simulation makes it possible to observe the mechanical phenomena occurred in the DLC film in the order of atomic scale during the indentation process, and to determine the raw hardness of DLC thin film by means of subtracting the influence of the substrate from the experimental result

Evaluation of Mechanical Properties of DLC Film with Molecular Dynamics Simulation. Evaluation of Hardness by Analysis of Indentation Behavior.