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precipitates and TiC impurities can be observed. With the Auto slice and view program, a sequence of SE images as the one shown in Fig.2 is obtained, with an image taken each time when a new cross-section is made using the Ga+ ion beam. In this experimental setup the step size used is 100 nm with a total of 55 steps, leading to an investigated volume of 136ƒÊm3. The 3D reconstruction of all the Ni4Ti3 precipitates is created in Amira(c) after proper alignment and image

3D Reconstruction of a Ni<SUB>51</SUB>Ti<SUB>49</SUB> Alloy with Precipitates by FIB-SEM Slice-and-view