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. The article presents the results of the influence of the technology of obtaining the material of the cathode of the implanter of the Cu – Fe system on the penetration depth of the titanium alloy VT20. It is shown that the use of 50% Cu – 50% Fe material as the material of the cathode of the implanter, obtained by alloying copper and iron, leads to a better increase in the thickness of the ion-doped layer than the use of the cathode obtained by powder metallurgy.

materials research proceedings

Influence of the Technology of Obtaining the Material of the Cathode of the Cu – Fe System at the Depth of Penetration of Ions into the Titanium Target