Open AccessPhase 2 of the automated array assembly task of the Low-Cost Silicon Solar Array Project. Annual report
Author(s) -
M G Coleman,
L P Gre,
E M Pastirik,
R A Pryor,
T G Sparks
Publication year - 1978
Language(s) - English
Resource type - Reports
DOI - 10.2172/5626184
Subject(s) - process (computing) , reliability (semiconductor) , etching (microfabrication) , silicon , sequence (biology) , cost reduction , computer science , silicon nitride , materials science , process engineering , nanotechnology , engineering , optoelectronics , chemistry , power (physics) , biochemistry , physics , management , layer (electronics) , quantum mechanics , economics , operating system