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The parametric and vibrational characteristics of PZTs (Piezoelectric Transducers) with different diameters before and after coupling are discussed by finite element analysis. It is shown that the vibration stability of the piezoelectric transducer decreases with increasing driving frequency. The PZT’s variation of maximum displacement with frequency shows the same trend for different driving conditions according to vibration measurement under conditions of both free and forced vibration (before and after sealing with the pump body). The maximum displacement under forced vibration is less than that under free vibration. The maximum displacement is inversely proportional to the diameter of the transducer and directly proportional to the driving voltage under both free and forced vibration. Micropumps with diffuser/nozzle microvalves are designed and fabricated with different external diameters of the PZTs. Finally, the flow rate and pressure of the micropumps are measured, which are consistent with the vibrational results. Moreover, the maximum displacement is larger under a square-wave driving signal, followed by a sine-wave signal, and then a triangle-wave signal. For a PZT with an external diameter of 12 mm, the maximum flow rate and pressure value are 150 μl/min and 346 Pa, respectively, under sine-wave driving at 100 Vpp driving voltage.

Modeling, Vibration Analysis and Fabrication of Micropumps Based on Piezoelectric Transducers