Open AccessStructure and Tribomechanical Properties of TiZrSiN Nanostructured Thin Films Deposited by Reactive Magnetron Sputtering
Author(s) -
В. В. Пилько,
F. F. Komarov
Publication year - 2018
Publication title -
advanced materials and technologies
Language(s) - English
Resource type - Journals
eISSN - 2541-8513
pISSN - 2414-4606
DOI - 10.17277/amt.2018.01.pp.014-021
Subject(s) - materials science , sputtering , sputter deposition , thin film , high power impulse magnetron sputtering , cavity magnetron , nanotechnology , chemical engineering , optoelectronics , engineering