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It has been suggested the technique based on analysis of geometry and intensity distribution profiles in Kikuchi patterns obtained due to electron backscattering diffraction for defining structural imperfection of diamond crystals. To determine the geometry parameters in Kikuchi patterns with the maximal precision, the special software was developed. It has been shown that application of electron diffraction (Kikuchi method) allows to obtain information about degree of perfection and homogeneity of real structure for diamond crystals synthesized with various methods.

Determination of structural homogeneity of synthetic diamonds from analysis of Kikuchi lines intensity distribution