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Phase-pure tantalum/zirconium oxide nitrides and nitrides were synthesized by the ammonolysis of amorphous oxide precursors. The nitrogen-rich oxide nitrides with variable anion composition and the nitride TaZrN 3  crystallize in the cubic bixbyite-type structure (space group  Ia 3̅). The nitrogen content of these compounds has a significant influence on the cell parameters, the atomic positions, and the optical band gap. The results extend the already well-studied Ta–Zr–O–N system by new oxide nitrides in addition to the already known baddeleyite- and anosovite-type phases. TaZrN 3  can be considered as a thermodynamically stable ternary variant of metastable Ta 2 N 3 .

Bixbyite-type phases in the system Ta-Zr-O-N