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During the reaction of Si 2 OCl 6  with H 2 O in the gas phase the intermediate Si 2 OCl 5 OH has been observed by mass-spectrometry. Reactive intermediates like this are responsible for the formation of higher chlorosilanes by slow hydrolysis reactions of chlorosilanes and -siloxanes. Reaction products of inter- and intramolecular condensation reactions have been observed by GC-MS-methods.

Hydrolytische Bildung von Perchlorsiloxanen / Formation of Chlorosiloxanes by Hydrolysis