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Electron backscattering rates of light elements (atomic number Z = 6, 13, 29) are evaluated for electron energies of E = 20···60 keV. The scattering amplitude in Moliere approximation is expanded as a series. The series elements are calculated in closed form with the aid of substitute functions. By comparison with the first Born approximation this yields correction factors of 1···1,25.

Elektronenrückstreuraten leichter Elemente in Molièrescher Näherung / Electron Backscattering Rates of Light Elements in Molière Approximation