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For the investigation of the possibility of the discharge-pumped Ar 2 * excimer laser oscillation whose wavelength is 126 nm, characteristics of the main-discharge in pure Ar at multi-atmospheric pressure (1~5 atm) have been investigated using the automatically pre-ionized (API) plasma electrode. It was demonstrated that the uniform pre-ionization formed the uniform main-discharge and that the maximum energy deposition into main-discharge increased. The control effect of capacitance C pr  was examined. It was compared with the light intensity of the main-discharge taken by integrated photograph and the two-dimensional simulation of the electric field distribution of the API plasma electrode discharge system.

Discharge Plasma Characteristics in Pure Ar Gas at Multi-Atmospheric Pressure Using the Automatically Pre-Ionized Plasma Electrode