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In this Part II of the paper on the evolution of carbon-rich Si–O–C polymer-derived ceramics (PDCs), emphasis is placed on the strengths and limitations of transmission electron microscopy (TEM) techniques with high lateral resolution, i. e., electron energy-loss spectroscopy (EELS), high-resolution TEM (HRTEM) and energy-filtered TEM (EFTEM). Here, the identical SiOC materials, as described in Part I. EELS studies confirmed the progression of structural rearrangements within the SiOC matrix temperatures exceeding 1200 °C. High-resolution TEM imaging showed that the SiOC matrices are indeed predominantly amorphous even upon high thermal treatment. Energy-filtered TEM analysis revealed, in contrast to the results obtained by Raman spectroscopy (Part I), that the excess free carbon phase undergoes a pronounced rearrangement within the amorphous microstructure. HRTEM characterization revealed the distribution of phases within the amorphous SiOC matrix; information that is not accessible by integral spectroscopic techniques. Discrepancies between the interpretation of experimental results obtained by local versus integral characterization tools are discussed in detail.

international journal of materials research

Evolution of C-rich SiOC ceramics: Part II. Characterization by high lateral resolution techniques: electron energy-loss spectroscopy, high-resolution TEM and energy-filtered TEM