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In this paper a lumped element model of RF MEMS capacitive switches which is scalable with the lateral dimensions of the bridge is proposed. The dependence of the elements of the model on the bridge dimensions is introduced by using one or more artificial neural networks to model the relationship between the bridge dimensions and the inductive and resistive elements of the lumped element model. The achieved results show that the developed models have a good accuracy over the whole considered range of the bridge dimension values.

Neural Based Lumped Element Model of Capacitive RF MEMS Switches