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The composition of the BN film was determined using Rutherford backscattering spectrometry (RBS) and nuclear reaction analysis (NRA). RBS can provide all the constituent concentrations in the films and the absolute determination of the number of atoms/cm However RBS is not suited to detection of light atoms deposited on a substrate material of higher atomic mass. On the other hand, the NRA has the advantage that it allows to measure the areal concentrations of nitrogen and boron in BNx films on Si substrates, although calibration is required using standard specimens. These experiments were carried out on the 2 MeV Van de Graaff accelerator connected to an ultra high vacuum (UHV) chamber. For RBS measurement, a 2He+ beam at 2.0 MeV, a total scattering angle of 168° and a beam incident angle to the substrate normal or 60 deg. were used. Zr and Pt films, 1150 Å to 3300 Å in thickness, deposited on vitreous carbon plates were used as a substrate. NRA was performed using a deuteron beam of 1.7 MeV and a beam incident angle of 20 deg. A peak from B(d,α)Be in an NRA spectrum of a standard sample appeared clearly without significant background, however a broad signal from B(d, α)Be appeared overlapping with a peak from N(d, α)C. Therefore the B(d, α)Be and N(d, α)C yields were estimated, since the ratio of B : B measured by RBS was 0.83 : 17, which is well consistent with the natural isotopic ratio, B : B =0.802 :0.192. In the case of calculating the N(d, α)C yields, the signal from B(d, α)Be was deconvoluted by taking into account the shape of B(d, α)Be signal. The areal ratio N/B was 7.73 and the error was -3.5 to +3.2%. These values will be used for determining composition of BN films. The conversion factor allows obtaining the composition of BN thin films on Si substrate.

Nuclear Reaction Analysis for Composition Measurement of BN Thin Films