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In this article, the recent and original results on the effect of thermoelastic damping (TED) on the vibrational properties of micro- and nano-mechanical resonators are reviewed. Thermoelastic damping is recognized as a significant loss mechanism at room temperature in micro-scale resonators. The thermoelastic damping theory was first presented by Zener in 1937, and recently refined by Lifshitz and Roukes. A review of the thermoelastic damping process is presented. Also the theoretical and experimental advances in this field are introduced and discussed. Finally, some results gained by the authors are presented

Advances in Thermoelastic Damping in Micro- and Nano- Mechanical Resonators: a Review