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Eiji KONDO**, Ryoga KAMO*** and Hiroshi MURAKAMI**** ** Department of Mechanical Engineering, Kagoshima University, 1-21-40 Korimoto, Kagoshima-shi, Kagoshima 890-0065, Japan E-mail: kondo@mech.kagoshima-u.ac.jp *** Tokyo Electron Kyushu Ltd., 1-1 Fukuhara, Koushi-shi, Kumamoto 861-1116, Japan **** Department of Mechanical Engineering, Kyushu Sangyo University, 2-3-1 Shokoudai, Hogashi-ku, Fukuoka-shi, Fukuoka 813-8503, Japan

Monitoring of Burr and Prefailure Phase Caused by Tool Wear in Micro-Drilling Operations Using Thrust Force Signals