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Nanometer-scale machining experiments on fused quartz surfaces have been performed using an atomic force microscope combined with a two-axis capacitive force/displacement transducer. The minimum normal force fnP required to reproducibly form a groove was about 4.7 µN. The minimum critical normal force fnR, tangential force ftR and groove depth dgR when the material removal process began were found to be 33.7 µN, 18.7 µN, and 4.3 nm, respectively. Changes in the swelling ratio Rs and the ratio of force components at the critical normal force fnR can be used to detect a critical condition when the material deformation behavior changes from plastic deformation to material removal.

Mechanism of Material Removal in Nanomachining of Fused Quartz using AFM Diamond Tip