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We present a detailed investigation of the growth kinetics of aluminium-related shallow thermal donors: the K-donors. Constraints for the diffusion mechanism of oxygen in silicon at temperatures approximate to 470 degrees C are found. A large entropy of the K-donors is considered as a possible explanation of high diffusivities and interaction radii found for the generation of the K-donors.

Kinetics of Formation and Metastability Mechanism for Thermal Donor-Related Defects in Al-Doped Silicon