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An Influence of Silicon Substrate Parameters on a Responsivity of MOSFET-Based Terahertz Detectors K. Kucharskia,∗, P. Zagrajek, D. Tomaszewski, A. Panas, G. Gluszko, J. Marczewski and P. Kopyt Instytut Technologii Elektronowej, L. Okulickiego 5E, 05-500 Piaseczno, Poland Military University of Technology, S. Kaliskiego 2, 00-908 Warsaw, Poland Institute of Radioelectronics, Nowowiejska 15/19, 00-665 Warsaw, Poland