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V. Romanyuk, N. Dmitruk, V. Karpyna, G. Lashkarev, V. Popovych, M. Dranchukb,∗, R. Pietruszka, M. Godlewski, G. Dovbeshko, I. Timofeeva, O. Kondratenko, M. Taborska, and A. Ievtushenko Institute of Semiconductor Physics, NASU, prosp. Nauky 45, Kyiv, Ukraine Institute for Problems of Material Science, NASU, Krzhizhanovskogo 3, Kyiv, Ukraine Institute of Physics, PAS, al. Lotników 32/46, 02-668 Warsaw, Poland Institute of Physics, NASU, prosp. Nauky 46, Kyiv, Ukraine

acta physica polonica. a

Optical and Electrical Properties of Highly Doped ZnO:Al Films Deposited by Atomic Layer Deposition on Si Substrates in Visible and Near Infrared Region