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Investigation of NbN and Nb–Si–N Coatings Deposited by Magnetron Sputtering V.I. Ivashchenko, P.L. Scrynskyy, O.S. Lytvyn, V.M. Rogozc,∗, O.V. Sobol, A.P. Kuzmenko, H. Komsta and C. Karvat Institute for Problems of Material Science, NASU, Krzhyzhanovsky Str. 3, 03680 Kiev 142, Ukraine Institute of Semiconductor Physics, NASU, Nauky Pr. 41, 03028 Kyiv, Ukraine Sumy State University, Rimsky-Korsakov Str. 2, 40000, Sumy, Ukraine National Technical University “Kharkiv Polytechnic Institute”, Frunze Str. 21, 61002, Kharkov, Ukraine Kursk State Technical University, Center for collective use “High Tech”, 305040, October 50 Str. 94, Kursk, Russia f Institute of Transport, Combustion Engines and Ecology, Lublin University of Technology, Nadbystrzycka 36, 20-618 Lublin, Poland Department of Electrical Devices and High Voltage Technology, Lublin University of Technology, Nadbystrzycka 36, 20-618 Lublin, Poland

Investigation of NbN and Nb-Si-N Coatings Deposited by Magnetron Sputtering