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The structure of probes for measurement of mechanical vibrations bases on three basic types of vibration sensors: seismometers, geophones, accelerometers [1 4]. A measuring sensor should remain in a rigid contact with the substrate. It transforms substrate vibrations into an output electric signal proportional to the vibration parameters. For harmonic vibrations the substrate displacement is determined by the following relation: Y (t) = D sinωt. The vibration parameters are as follows: the vibration frequency ω and one of the amplitudes: the displacement amplitude D, the vibration velocity amplitude [(dY (t)/dt) = Dω cosωt] or the vibration acceleration amplitude [(dY (t)/dt) = −Dω sinωt]. The output signal from a seismometer and a geophone is approximately proportional to the enforced vibration velocity, where the output signal from an accelerometer is approximately proportional to the enforced vibration acceleration.

Determination of Parameters of Surface Acoustic Wave Vibration Sensors with the Help of Gravitational Field