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A spectroscopic rotating polarizer-analyzer ellipsometer in which the polarizer and the analyzer rotate in opposite directions at the same speed and with a fixed retarder is proposed and investigated theoretically. The fixed phase retarder is introduced after the rotating polarizer to significantly reduce the percent error in the optical parameters. DOI: 10.12693/APhysPolA.123.183

Scanning Ellipsometer Using a Fixed Phase Retarder and Rotating Polarizer and Analyzer