Open AccessHigh-Speed Metal-Semiconductor-Metal Photodetectors Fabricated on SOI-Substrates
Author(s) -
KE Katri Honkanen,
N. Hakkarainen,
Kari Määttä,
Ari Kilpelä,
P. Kuivalainen
Publication year - 1999
Publication title -
physica scripta
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.415
H-Index - 83
eISSN - 1402-4896
pISSN - 0031-8949
DOI - 10.1238/physica.topical.079a00127
Subject(s) - materials science , optoelectronics , photodetector , schottky diode , dark current , silicon on insulator , semiconductor , schottky barrier , diode , heterojunction , biasing , laser , silicon , optics , voltage , electrical engineering , physics , engineering