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Atomic layer deposition (ALD) is ideal for applying precise andconformal coatings over nanoporous materials. We have recentlyused ALD to coat two nanoporous solids: anodic aluminum oxide(AAO) and silica aerogels. AAO possesses hexagonally orderedpores with diameters d∼40 nm and pore length L∼70microns. The AAO membranes were coated by ALD to fabricate catalytic membranes that demonstrate remarkable selectivity in theoxidative dehydrogenation of cyclohexane. Additional AAOmembranes coated with ALD Pd films show promise as hydrogensensors. Silica aerogels have the lowest density and highestsurface area of any solid material. Consequently, these materialsserve as an excellent substrate to fabricate novel catalyticmaterials and gas sensors by ALD

Atomic Layer Deposition for the Conformal Coating of Nanoporous Materials