Kinetic Processes Controlling Stress Evolution During Thin Film Deposition | Zendy

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Kinetic Processes Controlling Stress Evolution During Thin Film Deposition

Author(s) -

Eric Chason,

Jae Wook Shin,

Juan S. Tello,

Abhinav Bhandari,

Brian W. Sheldon,

Allan F. Bower

Publication year - 2007

Publication title -

meeting abstracts/meeting abstracts (electrochemical society. cd-rom)

Language(s) - Uncategorized

Resource type - Journals

eISSN - 2151-2035

pISSN - 1091-8213

DOI - 10.1149/ma2007-02/29/1425

Subject(s) - deposition (geology) , materials science , thin film , kinetic energy , stress (linguistics) , chemical engineering , nanotechnology , geology , physics , engineering , classical mechanics , philosophy , geomorphology , linguistics , sediment

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