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Optical scanning is a prevalent technique for optical neural interfaces where light delivery with high spatial and temporal precisions is desired. However, due to the sequential nature of point-scanning techniques, the settling time of optical modulators is a major bottleneck for throughput and limits random access targeting capabilities. While fast lateral scanners exist, commercially available varifocal elements are constrained to 3-ms settling times, limiting the speed of the overall system to hundreds of hertz. Faster focusing methods exist but cannot combine fast operation and dwelling capability with electrical and optical efficiency. Here, we present a varifocal mirror comprised of an array of piston-motion micro-electromechanical systems (MEMS) micromirrors and a custom driver application specific integrated circuit (ASIC), offering fast operation with dwelling capability while maintaining high diffraction efficiency. The ASIC features a reconfigurable nonlinear digital-to-analog converter (DAC) to simultaneously compensate for the built-in nonlinearity of electrostatic actuators and the global process variations in MEMS mirrors. Experimental results demonstrate a wide continuous sweeping range that spans 22 distinctly resolvable depth planes with refresh rates greater than 12 kHz.

A MEMS-Based Optical Scanning System for Precise, High-Speed Neural Interfacing