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This work reports on the measured performance of an Aluminum Scandium Nitride (AlScN) Two-Dimensional Resonant Rods resonator (2DRR), fabricated by using a Sc-doping concentration of <italic>24&#x0025;</italic>, characterized by a low off-resonance impedance (<inline-formula> <tex-math notation="LaTeX">$\sim $ </tex-math></inline-formula> <italic>25</italic> <inline-formula> <tex-math notation="LaTeX">$\Omega $ </tex-math></inline-formula>) and exhibiting a record electromechanical coupling coefficient (<inline-formula> <tex-math notation="LaTeX">${k}_{t}^{\textit {2}}$ </tex-math></inline-formula>) of <italic>23.9&#x0025;</italic> for AlScN resonators. In order to achieve such performance, we identified and relied on optimized deposition and etching processes for highly-doped AlScN films, aiming at achieving high crystalline quality, low density of abnormally oriented grains in the 2DRR&#x2019;s active region and sharp lateral sidewalls. Also, the 2DRR&#x2019;s unit-cell has been acoustically engineered to maximize the piezo-generated mechanical energy within each rod and to ensure a low transduction of spurious modes around resonance. Due to its unprecedented <inline-formula> <tex-math notation="LaTeX">${k}_{t}^{\textit {2}}$ </tex-math></inline-formula>, the reported 2DRR opens exciting scenarios towards the development of next generation monolithic integrated radio-frequency (RF) filtering components. In fact, we show that <inline-formula> <tex-math notation="LaTeX">$5^{th}$ </tex-math></inline-formula>-order 2DRR-based ladder filters with fractional bandwidths (BW) of <inline-formula> <tex-math notation="LaTeX">$\sim $ </tex-math></inline-formula> <italic>11&#x0025;</italic>, insertion-loss (I.L) values of <inline-formula> <tex-math notation="LaTeX">$\sim $ </tex-math></inline-formula> <italic>2.5 dB</italic> and with <inline-formula> <tex-math notation="LaTeX">$&gt;$ </tex-math></inline-formula> <italic>30 dB</italic> out-of-band rejections can now be envisioned, paving an unprecedented path towards the development of ultra-wide band (UWB) filters for next-generation Super-High-Frequency (SHF) radio front-ends. [2022-0024]

A 5.3 GHz Al0.76Sc0.24N Two-Dimensional Resonant Rods Resonator With a kt2 of 23.9%

A 5.3 GHz Al_0.76Sc_0.24N Two-Dimensional Resonant Rods Resonator With a k_t² of 23.9%