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We fabricated linear arrangements of multiple split-gate devices along an SOI mesa, thus forming a 2&#x00D7;N array of individually controllable Si quantum dots (QDs) with nearest neighbor coupling. We implemented two different gate reflectometry-based readout schemes to either probe spin-dependent charge movements by a coupled electrometer with single-shot precision, or directly sense a spin-dependent quantum capacitance. These results bear significance for fast, high-fidelity single-shot readout of large arrays of foundry-compatible Si MOS spin qubits.

Gate reflectometry for probing charge and spin states in linear Si MOS split-gate arrays