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We derive the formulas for the resonance frequencies and their sensitivity when the nano-slit structures are used in the detection of thin layers. For a thin layer with a thickness of $H$ deposited over the nanostructure, we show quantitatively that for both single and periodic slit structures with slit aperture size $\delta$, the sensitivity of resonance frequency reduces as $H$ increases. Specifically, the sensitivity is of order $O(\delta/H)$ if $H >\delta$ and of order $O(1+\ln H/\delta)$ otherwise. The evanescent wave modes are present along the interface between the thin dielectric film and ambient medium above. From the mathematical derivations, it is observed that the sensitivity of the resonance frequency highly depends on the effect of evanescent wave modes on the tiny slit apertures.

Sensitivity of resonance frequency in the detection of thin layer using nano-slit structures