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In this study, a comparative study of a series of (MCD/NCD) bilayer filmswith differentMCDgrain sizes andNCD layer thickness deposited on cemented tungsten carbide (WC-Co) flat substrates was conducted by changing the deposition time. Tribological behaviors of these diamond filmswere evaluated by using a reciprocal tribometer without lubrication. In friction test against Si3N4 balls, the (3hMCD/6hNCD) bilayerfilm showed the lowest coefficient of friction (0.059) andwear rates of counterpart balls (1.75×10mmN m) because of its lowest surface roughness and higher sp content. This work provides a guide to choose suitable (MCD/NCD) bilayer basic structure in multilayer diamond film for getting afine diamond filmwith low roughness and great tribological performance for different applications.

materials research express

Effect of bottom micro-crystalline diamond (MCD) layer and top nano-crystalline diamond (NCD) layer onto the tribological behavior of (MCD/NCD) bilayer film