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Frequency domain spectroscopy allows an experimenter to establish opticalproperties of solids in a wide frequency band including the technicallychallenging 10 THz region, and in other bands enables metrological comparisonbetween competing techniques. We advance a method for extracting the opticalproperties of high-index solids using only transmission-mode frequency domainspectroscopy of plane-parallel Fabry-Perot optical flats. We show thatdifferent data processing techniques yield different kinds of systematic error,and that some commonly used techniques have inherent systematic errors whichare underappreciated. We use model datasets to cross-compare algorithms inisolation from experimental errors, and propose a new algorithm which hasqualitatively different systematic errors to its competitors. We show that ourproposal is more robust to experimental non-idealities such as noise orapodization, and extract the complex refractive index spectrum of crystallinesilicon as a practical example. Finally, we advance the idea that algorithmsare complementary rather than competitive, and should be used together as partof a toolbox for better metrology.

Metrology of Complex Refractive Index for Solids in the Terahertz Regime Using Frequency Domain Spectroscopy