Open AccessA computationally assisted technique to measure material-specific surface coefficients in capacitively coupled plasmas based on characteristics of the ion flux-energy distribution function
Author(s) -
Christian Schulze,
Zoltán Donkó,
Jan Benedikt
Publication year - 2022
Publication title -
plasma sources science and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.9
H-Index - 108
eISSN - 1361-6595
pISSN - 0963-0252
DOI - 10.1088/1361-6595/ac95c2
Subject(s) - atomic physics , ion , electron , plasma , secondary electrons , chemistry , electron density , secondary emission , molecular physics , physics , organic chemistry , quantum mechanics