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In this work, we present the results of simulations carried out for N2-H2capacitively coupled radio-frequency discharges, running at low pressure(0.3-0.9 mbar), low power (5-20 W), and for amounts of H2 up to 5 pct.Simulations are performed using a hybrid code that couples a two-dimensionaltime-dependent fluid module, describing the dynamics of the charged particlesin the discharge, to a zero-dimensional kinetic module, that solves theBoltzmann equation and describes the production and destruction of neutralspecies. The model accounts for the production of several vibrationally andelectronic excited states, and contains a detailed surface chemistry thatincludes recombination processes and the production of NHx molecules. Theresults obtained highlight the relevance of the interactions between plasma andsurface, given the role of the secondary electron emission in the electricalparameters of the discharge and the critical importance of the surfaceproduction of ammonia to the neutral and ionic chemistry of the discharge.

N2-H2 capacitively coupled radio-frequency discharges at low pressure. Part II. Modelling results: the relevance of plasma-surface interaction