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The mixing of N2 with H2 leads to very different plasmas from pure N2 and H2plasma discharges. Numerous issues are therefore raised involving the processesleading to ammonia (NH3) formation. The aim of this work is to bettercharacterize capacitively-coupled radiofrequency plasma discharges in N2 withfew percents of H2 (up to 5 pct), at low pressure (0.3 to 1 mbar) and lowcoupled power (3 to 13 W). Both experimental measurements and numericalsimulations are performed. For clarity, we separated the results in twocomplementary parts. The actual one (first part), presents the details on theexperimental measurements, while the second focuses on the simulation, a hybridmodel combining a 2D fluid module and a 0D kinetic module. Electron density ismeasured by a resonant cavity method. It varies from 0.4 to 5e9 cm-3,corresponding to ionization degrees from 2e-8 to 4e-7. Ammonia density isquantified by combining IR absorption and mass spectrometry. It increaseslinearly with the amount of H2 (up to 3e13 cm-3 at 5 pct H2). On the contrary,it is constant with pressure, which suggests the dominance of surface processeson the formation of ammonia. Positive ions are measured by mass spectrometry.Nitrogen-bearing ions are hydrogenated by the injection of H2, N2H+ being themajor ion as soon as the amount of H2 is larger than 1 pct. The increase ofpressure leads to an increase of secondary ions formed by ion (or radical) -neutral collisions (ex: N2H+, NH4+, H3+), while an increase of the coupledpower favours ions formed by direct ionization (ex: N2+, NH3+, H2+).

plasma sources science and technology

N2-H2 capacitively coupled radio-frequency discharges at low pressure.  Part I. Experimental results: effect of the H2 amount on electrons, positive  ions and ammonia formation