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A thorough understanding of the energy transfer mechanism from the electricfield to electrons is of utmost importance for optimization and control ofdifferent plasma sources and processes. This mechanism, called electron powerabsorption, involves complex electron dynamics in electronegative capacitivelycoupled plasmas (CCPs) at low pressures, that are still not fully understood.Therefore, we present a spatio-temporally resolved analysis of electron powerabsorption in low pressure oxygen CCPs based on the momentum balance equationderived from the Boltzmann equation. Data are obtained from 1d3vParticle-In-Cell / Monte Carlo Collision simulations. In contrast toconventional theoretical models, which predict 'stochastic/collisionlessheating' to be important at low pressure, we observe the dominance of Ohmicpower absorption. In addition, there is an attenuation of ambipolar powerabsorption at low pressures due to the strong electronegativity, and thepresence of electropositive edge regions in the discharge, which cause a highdegree of temporal symmetry of the electron temperature within the RF period.

Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas