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Metasurfaces control optical wavefronts via arrays of nanoscale resonatorslaid out across a surface. When combined with III-V semiconductors with strongoptical nonlinearities, a variety of nonlinear effects such as harmonicgeneration and all optical modulation can be enabled and enhanced at thenanoscale. This review presents our research on engineering and boostingnonlinear effects in ultrafast and nonlinear semiconductor metasurfacesfabricated at the Center for Integrated Nanotechnologies (CINT). We cover ourrecent works on parametric generation of harmonic light via direct and cascadedprocesses in GaAs-metasurfaces using Mie-like optical resonances orsymmetric-protected Bound State in the Continuum, and then describe the recentadvances on harmonic generation in all-dielectric metasurfaces coupled tointersubband transitions in III-V semiconductor heterostructures. The reviewconcludes on the potential of metasurfaces to serve as the next platform foron-chip quantum light generation.

Nonlinear and Ultrafast All-Dielectric Metasurfaces at the Center for Integrated Nanotechnologies