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A multilayer deposition method has been developed with the potential to capture and process atomic clusters generated by a high flux cluster beam source. In this deposition mode a series of sandwich structures each consisting of three layers-a carbon support layer, cluster layer and polymer release layer-is sequentially deposited to form a stack of isolated cluster layers, as confirmed by through-focal aberration-corrected HAADF STEM analysis. The stack can then be diced into small pieces by a mechanical saw. The diced pieces are immersed in solvent to dissolve the polymer release layer and form small platelets of supported clusters.

Towards production of novel catalyst powders from supported size-selected clusters by multilayer deposition and dicing