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Diamond-like carbon (DLC) films are synthesized on Si using plasma enhancedchemical vapor deposition. The role of substrate bias and nitrogen doping onthe structural evolution and local elastic modulus of DLC films aresystematically investigated. Raman spectroscopic studies reveal that the amountof graphitic C=C sp2 bonding increases with substrate bias and nitrogen doping.The density and hydrogen concentration in the films are found to vary from 0.7to 2.2 g/cm3 and 16 to 38 atomic %, respectively, depending upon the substratebias and nitrogen concentration in the DLC films. Atomic force acousticmicroscopic (AFAM) analysis shows a direct correlation between local elasticmodulus and structural properties estimated by Raman spectroscopy, Rutherfordback scattering and elastic recoil detection analysis. AFAM analysis furtherconfirms the evolution of soft second phases at high substrate biases (> -150V)in undoped DLC films. Further, N doping leads to formation of such soft secondphases in DLC films even at lower substrate bias of -100 V. The AFAM studiesprovide a direct microscopic evidence for the "sub-implantation growth model"which predicts the formation of graphitic second phases in DLC matrix at highsubstrate biases.