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We developed a microdisplay-based microscope projection photolithography(MDMPP) technique in which a liquid crystal (LC) microdisplay is used as areconfigurable photomask for a microscope projector. The LC microdisplayprovides a significant advantage in terms of cost and speed since patterns canbe generated through software instead of redesigning and fabricating glassphotomasks. The constructed MDMPP system could produce line patterns as narrowas 2.4 um, smaller than that specified by the diffraction limit, with the aidof a 4X objective lens. The achievement of a linewidth smaller than thetheoretical limit may be ascribed to a combination of overexposure and theunderetching effect, in addition to the good optical performance of the system.In a diffraction experiment performed with fabricated slits, the application ofthe MDMPP technique helped provide various patterns of the slits, demonstratingthe potential usefulness of the MDMPP system in undergraduate optics courses.We expect that MDMPP can contribute to the field of physics education andvarious areas of research, such as chemistry and biology, in the future.

Microscope Projection Photolithography Based on Liquid Crystal Microdisplay