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A new combined PIC-MCC approach is developed for accurate and fast simulationof a radio frequency discharge at low gas pressure and high density of plasma.Test calculations of transition between different modes of electron heating ina ccrf discharge in helium and argon show a good agreement with experimentaldata.  We demonstrate high efficiency of the combined PIC-MCC algorithm, especiallyfor the collisionless regime of electron heating.Comment: 6 paged, 8 figure

Combined PIC–MCC approach for fast simulation of a radio frequency discharge at a low gas pressure