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Micro-cantilever beam are now widely used in modern micro and nano devices. This device includes micro-switches and microscopes which are operated by atomic force. The dynamic analysis of cantilever beams is of critical prior to manufacturing of the beams. Dynamic analysis is carried out using an energy technique based on Galerkin method and pull-in parameters are to be found out for prismatic cantilever. In squeeze film damping the air present between movable beam and fixed beam behave as squeezed fluid and producing the damping effect which lead to reducing in displacement. In case of fringing field the line of action of electrostatic force do not remain perpendicular at the boundaries. The effect of damping due to Squeeze film and fringing field on dynamic performance of beam is studied and found out the pull-in factors and matched with the published outcomes. This area opens novel opportunities for structural optimization of electrostatic micro-beams.

Dynamic analysis of micro-cantilever with electrostatic force