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Lead-free piezoelectrics are considered an alternative to lead-based piezo-material for various device applications such as energy harvesters, actuators, and sensors. Ba 0.85 Ca 0.15 Zr 0.1 Ti 0.9 O 3  (BCZT) and 0.94(Na 0.5 Bi 0.5 )TiO 3 -0.06BaTiO 3  (NBT-BT) are the lead-free piezoelectrics that are commonly studied due to their superior properties. In this study, we have fabricated thick films of NBT-BT (∼700 nm), BCZT (∼700 nm), and heterostructures comprising both BCZT/NBT-BT(∼500 nm) on commercial Pt(111)/TiO 2 /SiO 2 /Si substrates using Pulsed Laser Deposition method. The phase purity of these films was confirmed by X-ray diffraction analysis. The ferroelectric properties of these films were measured using piezo-response force microscopy. The devices were tested by subjecting them to the vibrations of varying frequencies and loads using a vibration simulator/tester for vibration sensing. The BCZT film generated a significant voltage output (∼2 mV). These thick films possess excellent sensitivity and high voltage output, making them candidates for device applications.

ferroelectrics

Ba 0.85 Ca 0.15 Zr 0.1 Ti 0.9 O 3  (BCZT)/0.94(Na 0.5 Bi 0.5 )TiO 3 -0.06BaTiO 3 (NBT-BT) heterostructures for the applications of vibration sensing and energy harvester