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Inspired by nature, we investigate the short-range order effect on thephysical properties of amorphous materials. Amorphous Al2O3 thin films exhibita higher proportion of their 4-coordinated Al sites close to the surface,causing variations in the average short-range order of the film. Below somethickness, the density of these films changes with size. In this work, weaddress the short-range order effect, through the thickness, on the electronicand optical properties of atomic layer deposited (ALD) Al2O3 thin films. Boththe refractive index and the permittivity were found to vary with size. Therefractive index increased with thickness, and for thick films (~50 nm) it wascomparable to that of bulk amorphous Al2O3. The permittivity increased withthickness as well, but did not attain those of the bulk material. We discusshow these effects correlate with the density and short-range order. Theseresults shed light on the size effects in thin amorphous oxides, and may guidethe design of electronic and optical components and devices.

Thickness Dependence of the Physical Properties of Atomic-Layer Deposited Al2O3