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The problem of providing key quality indicators (indicators of purpose, manufacturability, reliability) of micro-and nanodevices at the design stage is considered. The limitations imposed by a group technology production on methods ensuring serial production availability and reliability of micro- and nanodevices are described. The design of micro-and nanodevices methodology that allows to ensure the optimal balance between serial production availability in the given production conditions and time to failure in the specified operation conditions under given restrictions on the device purpose indicators by taking into account the technological and operational factors is described.

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Methodology of technological and operational factors accounting in the process of complex optimal design of microand nanodevices manufactured using group technologies